JPH0217549U - - Google Patents
Info
- Publication number
- JPH0217549U JPH0217549U JP9446588U JP9446588U JPH0217549U JP H0217549 U JPH0217549 U JP H0217549U JP 9446588 U JP9446588 U JP 9446588U JP 9446588 U JP9446588 U JP 9446588U JP H0217549 U JPH0217549 U JP H0217549U
- Authority
- JP
- Japan
- Prior art keywords
- ions
- plasma
- chamber
- horizontal grooves
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002826 coolant Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 4
- 239000007789 gas Substances 0.000 claims 2
- 230000007935 neutral effect Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9446588U JPH0217549U (en]) | 1988-07-15 | 1988-07-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9446588U JPH0217549U (en]) | 1988-07-15 | 1988-07-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0217549U true JPH0217549U (en]) | 1990-02-05 |
Family
ID=31318991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9446588U Pending JPH0217549U (en]) | 1988-07-15 | 1988-07-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217549U (en]) |
-
1988
- 1988-07-15 JP JP9446588U patent/JPH0217549U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2961113B2 (ja) | 閉電子ドリフトを持つプラズマ加速器 | |
| UA32449C2 (uk) | Прискорювач плазми з замкненим дрейфом електронів | |
| US2798181A (en) | Pumping ion source | |
| JPH0217549U (en]) | ||
| GB987371A (en) | Charged particle generator | |
| JPH09270245A (ja) | 不純物イオン発生装置及びこれを用いた質量分析装置 | |
| JPH0449447U (en]) | ||
| JPS5740845A (en) | Ion beam generator | |
| GB888108A (en) | A plasma accelerator and modified picket-fence magnetic field plasma containment device | |
| JPS5924358Y2 (ja) | イオン化装置 | |
| JPS55134767A (en) | Electronic impulse type ion engine | |
| JPS6311560U (en]) | ||
| JPH0455749U (en]) | ||
| JP3076176B2 (ja) | 複合型イオン源装置 | |
| JPS6251648U (en]) | ||
| JPH02129650U (en]) | ||
| JP2989989B2 (ja) | イオン発生装置 | |
| JPH05135705A (ja) | イオン源 | |
| JPS62296358A (ja) | イオンビ−ム装置 | |
| JPH03101848U (en]) | ||
| JPS58120557U (ja) | 負イオン検出装置 | |
| JPH06139979A (ja) | Ｅｃｒイオン源への電子供給方法および装置 | |
| JPH0379153U (en]) | ||
| JPH0394753U (en]) | ||
| JPS6166868A (ja) | Ｒｆ型イオン・エンジン |